SP resonance angle and Q-factor of metals in ultraviolet band

Lanxi Duan; Saisai Qin; Yaru Li; Tao Jin; Zimin Li; Menglei Chen; Wangxia Huang; Jianping Shi

doi:10.1117/12.2507756

24 January 2019 SP resonance angle and Q-factor of metals in ultraviolet band

Lanxi Duan, Saisai Qin, Yaru Li, Tao Jin, Zimin Li, Menglei Chen, Wangxia Huang, Jianping Shi

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 108400K (2019) https://doi.org/10.1117/12.2507756
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Surface plasmon (SP) properties of more than dozen of metal materials have been comparative analyzed in ultraviolet (UV) band (436nm, 365nm) which are the typical light source used in SP lithography. We excited the SP wave by Otto configuration. The electromagnetic field in the structure were calculated by the full-vector FDTD algorithm. The SP resonance angle and the quality factor of the resonance peak were extracted. The results showed that the calculated SP resonance angle is approximately the same as the angle expected by the SP theory , and the error is no more than 5%. This gave an evidence that the SP theory is still applicable in the UV band although the theoretical model of permittivity, such as Drude, Lorentz and Debye, is ineffective at this time. We choose some metals with smaller errors to research the quality factor of SP resonance peaks. The results showed that even if the excitation angle was similar, the Q-factor was different which mean that the propagation length of the same SP wave was different. It can provide references for material selection when designing SP devices in UV band.

Citation Download Citation

Lanxi Duan, Saisai Qin, Yaru Li, Tao Jin, Zimin Li, Menglei Chen, Wangxia Huang, and Jianping Shi "SP resonance angle and Q-factor of metals in ultraviolet band", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 108400K (24 January 2019); https://doi.org/10.1117/12.2507756

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KEYWORDS

Surface plasmons

Metals

Ultraviolet radiation

Aluminum

Gold

Rhodium

Lithography

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