Porous silicon sensors: From on-chip to mobile diagnostics

Tengfei Cao; Caitlin Carfano; Gilberto A. Rodriguez; Moinul H. Choudhury; Francis O. Afzal; Sharon M. Weiss

doi:10.1117/12.2508685

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5 March 2019 Porous silicon sensors: From on-chip to mobile diagnostics

Tengfei Cao, Caitlin Carfano, Gilberto A. Rodriguez, Moinul H. Choudhury, Francis O. Afzal, Sharon M. Weiss

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Proceedings Volume 10891, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XVI; 1089112 (2019) https://doi.org/10.1117/12.2508685
Event: SPIE BiOS, 2019, San Francisco, California, United States

Abstract

Porous silicon (PSi) has been recognized as an advantageous material for use in optical biosensors due to its large internal surface area, ability to form multilayer optical structures, and compatibility with standard silicon lithographic techniques. We demonstrate an order of magnitude improvement in small molecule detection sensitivity for on-chip PSi ring resonators and photonic crystal nanobeams compared to the same structures fabricated on silicon-on-insulator wafers. Moreover, we demonstrate that PSi optical structures can be exploited for mobile diagnostics by using a smartphone with no additional functional accessories to detect color changes in the PSi that result from molecule capture.

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Tengfei Cao, Caitlin Carfano, Gilberto A. Rodriguez, Moinul H. Choudhury, Francis O. Afzal, and Sharon M. Weiss "Porous silicon sensors: From on-chip to mobile diagnostics", Proc. SPIE 10891, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XVI, 1089112 (5 March 2019); https://doi.org/10.1117/12.2508685

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