Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation)

Wei Chu; Ya Cheng

doi:10.1117/12.2505724

4 March 2019 Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation)

Wei Chu, Ya Cheng

Author Affiliations +

Proceedings Volume 10906, Laser-based Micro- and Nanoprocessing XIII; 1090618 (2019) https://doi.org/10.1117/12.2505724
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

We present a method based on simultaneous spatiotemporal focusing (SSTF) of the femtosecond laser pulses that enables to fabricate 3D structures on the centimeter scale. The isotropic spatial resolutions of fabrication have been achieved in different materials, making this approach easy to implement. For example, applying simultaneous spatiotemporal focusing (SSTF) of femtosecond laser pulses in two-photon polymerization (TPP) (i.e., termed as SSTF-TPP hereafter) uniquely allows for producing centimeter-scale 3D structures at a spatial resolution as high as ~10 μm. The fabrication resolution can be tuned simply by varying the power of femtosecond laser. The capacity of this SSTF-TPP method is confirmed by fabricating complex 3D structures such as Chinese guardian lions and a Terra Cotta Warrior. In addition, based on the SSTF scheme, we demonstrate 3D microprocessing in glass with a nearly invariant spatial resolution for a large range of penetration depth without any aberration correction. The SSTF technique can be useful for a broad range of superfine 3D printing applications such as micro-electromechanical systems (MEMS), infrared or Terahertz photonics, microfluidics, and 3D bio-printing.

Conference Presentation

Citation Download Citation

Wei Chu and Ya Cheng "Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation)", Proc. SPIE 10906, Laser-based Micro- and Nanoprocessing XIII, 1090618 (4 March 2019); https://doi.org/10.1117/12.2505724

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