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4 March 2019 Analysis of regular polygonal ring resonator based on multi-mode waveguide
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We analyzed regular polygonal ring resonators based on multi-mode waveguide using finite-difference time-domain simulation. It consists of the regular polygonal ring waveguide, total internal reflection mirror, and MMI coupler. In general, multi-mode waveguide-based resonator is difficult to use as sensors because of poor output characteristics. By using the low reflectance of the higher-order mode compared to the fundamental mode in the TIR mirror, we designed a regular polygonal ring resonator that can be used as sensors even when a multi-mode waveguide is used instead of a single-mode waveguide. In fabrication, the multi-mode waveguide has a wider line width than the single-mode waveguide, which reduces the process cost and enables mass production. The width and height of the multi-mode waveguide are designed to be 2.5 μm and 2 μm, respectively using SU-8 polymer. The regular hexagon ring resonator shows the highest Q-factor of 1.03×104 among the various regular polygonal ring resonators.
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Sun-Ho Kim, Dohyun Kim, Su-Jin Jeon, Eudum Kim, Jae-Sang Lee, and Young-Wan Choi "Analysis of regular polygonal ring resonator based on multi-mode waveguide", Proc. SPIE 10921, Integrated Optics: Devices, Materials, and Technologies XXIII, 109211L (4 March 2019);

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