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4 March 2019 Rapid device prototyping using the CORNERSTONE platform (Conference Presentation)
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Proceedings Volume 10923, Silicon Photonics XIV; 1092303 (2019)
Event: SPIE OPTO, 2019, San Francisco, California, United States
The field of silicon photonics has expanded rapidly over the past several decades. This has led to a degree of standardisation in the commercial device fabrication foundries that are available for universities and fabless companies alike. Whilst this is advantageous in terms of yield, repeatability etc., it is not conducive for researchers to develop new and novel devices for future systems. CORNERSTONE offers researchers a flexible device prototyping capability that can support photonics research around the world. The CORNERSTONE project (Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy, aNd sEnsing) is a UK Engineering and Physical Sciences Research Council (EPSRC) funded project between 3 UK universities: University of Southampton, University of Glasgow and University of Surrey. The project is based on deep-ultraviolet (DUV) photolithography equipment, installed at the University of Southampton, centred around a 248 nm Scanner, the first of its kind in a UK university. Utilising these facilities, CORNERSTONE will offer a multi-project wafer (MPW) service on several silicon-on-insulator (SOI) platforms (220 nm, 340 nm & 500 nm) for both passive and active silicon photonic devices. This talk will give an overview of the CORNERSTONE project, present some of its early data, and summarise future MPW offerings.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Callum G. Littlejohns, Ying Tran, Han Du, Stevan Stanković, Xingzhao Yan, Graham Sharp, Marc Sorel, Roger Webb, Jonathon England, Harold Chong, Frederic Y. Gardes, David J. Thomson, Goran Z. Mashanovich, and Graham T. Reed "Rapid device prototyping using the CORNERSTONE platform (Conference Presentation)", Proc. SPIE 10923, Silicon Photonics XIV, 1092303 (4 March 2019);


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