Characterization of latent three-dimensional exposure patterns in photoresists

Edy Yulianto; Vytautas Purlys; Vygantas Mizeikis

doi:10.1117/12.2510806

4 March 2019 Characterization of latent three-dimensional exposure patterns in photoresists

Edy Yulianto, Vytautas Purlys, Vygantas Mizeikis

Author Affiliations +

Proceedings Volume 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII; 109300G (2019) https://doi.org/10.1117/12.2510806
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

We report on the imaging of latent 3D features exposed in photoresist during Direct Laser Write micro-/nanofabrication. The imaging method is based on monitoring of photoluminescence emitted by photonitiator in the photoresist, and exploits photoluminescence quenching and its dependence on the dose of the previous optical exposure. By spatially scanning focus of a low-intensity laser beam over the previously recorded latent features, spatial PL intensity maps reveal negative image of the latent pattern, and allows determination of feature size and shape prior to development. The imaging can be carried in situ, immediately after the fabrication, and does not require extensive modification to the existing equipment.

Conference Presentation

Citation Download Citation

Edy Yulianto, Vytautas Purlys, and Vygantas Mizeikis "Characterization of latent three-dimensional exposure patterns in photoresists", Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 109300G (4 March 2019); https://doi.org/10.1117/12.2510806

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE