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In view of the increasing demands on precision optics, microelectronics and precision mechanics nanoscale structuring processes are of great interest. It is becoming more and more important to apply a large number of structures that are as small as possible to ever larger areas with high reliability and to increase the number of structures per area element (packing density). The straightness and uniformity of these structures, as well as the positioning accuracy during the fabrication of such narrow lines and points are at the center of the increase of the packing density. A further decisive role is played by the development of suitable sensors and tools for the production and measurement of these structures. The development and the combination of a new laser based probe for the measurement and a direct laser writing (DLW) tool for the creation of sub-micro structures forms the core of this topic. The new sensor is based on a confocal measuring principle. A fiber coupling is used to avoid thermal influences. At the same time, the fiber end itself serves as a confocal pinhole. For the process tool, comprehensive investigations of laser and resist parameters are necessary. The first results are shown. These two parts are investigated separately and combined at the end of the work. In order to achieve the necessary positioning accuracy, the tool is integrated into the Nanopositioning and Measurement Machine (NPMM).
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