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4 March 2019 MEMS mirror module for programmable light system
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Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310L (2019) https://doi.org/10.1117/12.2511074
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
An updated Programmable Light System (PLS) is demonstrated using a MEMS Mirror Module (MMM), allowing users to program the brightness and shape of a projected white light in a variety of dynamic solid-state lighting applications, e.g. in automotive dynamic headlights. The MMM is a new module which consists of a fast beam steering MEMS mirror with high optical laser power handling and a smart MEMS Driver with real time monitoring of the MEMS mirror for better system safety and mirror control. The PLS consists of the MMM, a multi-Watt 445-450nm laser source with beam shaping optics, a phosphor target, and projection optics to project a white light within the field of view of up to 60°. Devices such as the 1.2mm diameter A3I12.2 and 2.0mm diameter A7M20.1 aluminum coated mirror have been tested at >8W of CW power before seeing any damage to the device. The A7M20.1 MEMS mirror has been extensively tested (>100 hours) with 4W of CW power at room temperature with no physical damage. Same 4W operation, has also been successfully tested at elevated environmental temperature of 100°C during extended tests.

PLS prototypes to date utilize only ~1W-2W laser diode sources, as limited by power of available laser diodes. The extended tests and thermal studies of the MMM however show that operation at up to 100°C with e.g. 4W CW power could be safely run for at least 10000 hours, even with MEMS mirrors with a simple aluminum coating (no protection or enhancement layers).
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Abhishek Kasturi, Veljko Milanovic, Frank Hu, Hong Joo Kim, Derek Ho, and Daniel B. Lovell "MEMS mirror module for programmable light system", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310L (4 March 2019); https://doi.org/10.1117/12.2511074
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