Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors

Song Xu; Suangliang Li; Jun Zou

doi:10.1117/12.2507317

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4 March 2019 Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors

Song Xu, Suangliang Li, Jun Zou

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Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310M (2019) https://doi.org/10.1117/12.2507317
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

This paper reports a new micromachined two-axis water-immersible micro scanning mirror using BoPET (biaxiallyoriented polyethylene terephthalate) hinges. A new fabrication process based on lithography, wafer-bonding, and reactive ion etching on a hybrid silicon-polymer substrate was developed to enable high-resolution patterning, miniaturization and also batch fabrication capability. For demonstration, a prototype scanning mirror was designed, fabricated and tested. Its overall size was reduced to 5×5×5 mm³, which is comparable to that of a typical siliconbased micro scanning mirror. The testing results show good raster scanning performance. This approach could enable the miniaturization and batch fabrication of water-immersible scanning mirrors for different scanning optical and acoustic imaging applications in liquid environments.

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Song Xu, Suangliang Li, and Jun Zou "Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310M (4 March 2019); https://doi.org/10.1117/12.2507317

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