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4 March 2019 On-chip silicon-photonics based integrated vibrometer
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Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310T (2019)
Event: SPIE OPTO, 2019, San Francisco, California, United States
In this paper, we demonstrate a compact Silicon photonics-based on-chip integrated interference vibrometer. Unlike conventional readout methods, the demonstrated system is alignment-free and offers multiplex sensing. The intensity that is modulated by the cantilever motion by a photodetector. We present the static and dynamic response of the cantilever by electrostatic excitation validated using ac commercial Laser-Doppler-Vibrometer. We also present a detailed simulation, optimisation and sensitivity analysis of the proposed on-chip vibrometer. Furthermore, the tunability of the sensor to achieve maximum sensitivity is demonstrated.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Viphretuo Mere, Aneesh Dash, Rakshitha Kallega, Akshay Naik, Rudra Pratap, and Shankar Kumar Selvaraja "On-chip silicon-photonics based integrated vibrometer", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310T (4 March 2019);


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