Translator Disclaimer
Presentation + Paper
4 March 2019 On-chip silicon-photonics based integrated vibrometer
Author Affiliations +
Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310T (2019) https://doi.org/10.1117/12.2509203
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
In this paper, we demonstrate a compact Silicon photonics-based on-chip integrated interference vibrometer. Unlike conventional readout methods, the demonstrated system is alignment-free and offers multiplex sensing. The intensity that is modulated by the cantilever motion by a photodetector. We present the static and dynamic response of the cantilever by electrostatic excitation validated using ac commercial Laser-Doppler-Vibrometer. We also present a detailed simulation, optimisation and sensitivity analysis of the proposed on-chip vibrometer. Furthermore, the tunability of the sensor to achieve maximum sensitivity is demonstrated.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Viphretuo Mere, Aneesh Dash, Rakshitha Kallega, Akshay Naik, Rudra Pratap, and Shankar Kumar Selvaraja "On-chip silicon-photonics based integrated vibrometer", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310T (4 March 2019); https://doi.org/10.1117/12.2509203
PROCEEDINGS
6 PAGES + PRESENTATION

SHARE
Advertisement
Advertisement
RELATED CONTENT

Passive integrated optics in optical sensor systems
Proceedings of SPIE (August 01 1991)
Normal incidence optical IC
Proceedings of SPIE (December 10 1993)
Silicon photonics developments in Europe
Proceedings of SPIE (February 13 2009)

Back to Top