High-power VCSELs and arrays based on lithographic apertures with improved spectral and beam quality (Conference Presentation)

Dennis Deppe; Achyut Srinivasa; Paul Kutch; Mark Poole; Latika K. Eifert; Frank M. Tucker; Travis R. Hillyer; Mina Bayat; Pratheek Michael; Chetan Swamy; Shikha Kalbele; Sarvesh Rane

doi:10.1117/12.2508502

4 March 2019 High-power VCSELs and arrays based on lithographic apertures with improved spectral and beam quality (Conference Presentation)

Dennis Deppe, Achyut Srinivasa, Paul Kutch, Mark Poole, Latika K. Eifert, Frank M. Tucker, Travis R. Hillyer, Mina Bayat, Pratheek Michael, Chetan Swamy, Shikha Kalbele, Sarvesh Rane

Author Affiliations +

Proceedings Volume 10938, Vertical-Cavity Surface-Emitting Lasers XXIII; 109380K (2019) https://doi.org/10.1117/12.2508502
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

The growing demand for cost effective LIDAR sensors in automobile and military applications in LIDAR and free space optics could be met by compact and solid state, high power 2D VCSEL arrays. In this type of an array hundreds or more high power VCSELs can be monolithically integrated. This greatly reduces the cost over separately packaged lasers. In addition, beam quality and spectral quality make high power VCSELs important laser sources for free space data links. In this talk we introduce a different type of high power VCSEL that uses an oxide-free, lithographic aperture. The aperture enables a very low effective index change to help prevent trapping of internal modes that can occur with oxide VCSELs. The zero index aperture was designed to remove the internal ring modes that oxide VCSELs have, resulting in a lasing pattern with low optical loss. The novel zero index aperture is placed near the cavity spacer to improve its effect on confinement and electrical injection, and yet minimizing internal guiding of the optical mode. The VCSELs using the new aperture have been tested for their pulsed power, pulse response, device efficiency and beam quality. Dense arrays show high beam quality and record narrow spectral emission. Measured results of multi and single transverse mode VCSELs arrays with dense packing are also reported.

Conference Presentation

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Dennis Deppe, Achyut Srinivasa, Paul Kutch, Mark Poole, Latika K. Eifert, Frank M. Tucker, Travis R. Hillyer, Mina Bayat, Pratheek Michael, Chetan Swamy, Shikha Kalbele, and Sarvesh Rane "High-power VCSELs and arrays based on lithographic apertures with improved spectral and beam quality (Conference Presentation)", Proc. SPIE 10938, Vertical-Cavity Surface-Emitting Lasers XXIII, 109380K (4 March 2019); https://doi.org/10.1117/12.2508502

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KEYWORDS

Vertical cavity surface emitting lasers

Lithography

LIDAR

Oxides

Defense technologies

Free space optics

High power lasers

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