For this study, we focus on the dark-field illumination system for index-matched near-field microscope using an aplanatic solid immersion lens (A-SIL). We present dark-field illumination that has illumination channels on the side of the A-SIL to overcome the issue of deficient space. The table-top experiments are conducted to show a feasibility of a dark-field imaging method for the near-field condition before verifying the performance of the optical system. |
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Imaging systems
Near field
Manufacturing
Image resolution
Inspection
Objectives
Sensors