Linearized and compensated interferometric system for high-velocity traceable length calibration on a metre scale

Simon Rerucha; Bretislav Mikel; Zdenek Matej; Ondrej Herman; Miroslava Hola; Michal Jelinek; Petr Jedlicka; Ondrej Cip; Josef Lazar

doi:10.1117/12.2519461

18 December 2018 Linearized and compensated interferometric system for high-velocity traceable length calibration on a metre scale

Simon Rerucha, Bretislav Mikel, Zdenek Matej, Ondrej Herman, Miroslava Hola, Michal Jelinek, Petr Jedlicka, Ondrej Cip, Josef Lazar

Author Affiliations +

Proceedings Volume 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 1097608 (2018) https://doi.org/10.1117/12.2519461
Event: 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2018, Lednice, Czech Republic

Abstract

We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0:1 metre per second.

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Simon Rerucha, Bretislav Mikel, Zdenek Matej, Ondrej Herman, Miroslava Hola, Michal Jelinek, Petr Jedlicka, Ondrej Cip, and Josef Lazar "Linearized and compensated interferometric system for high-velocity traceable length calibration on a metre scale", Proc. SPIE 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1097608 (18 December 2018); https://doi.org/10.1117/12.2519461

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