Paper
18 December 2018 Modification of angular photoresponse of InGaAsN-based photodiode with 3D woodpile structures
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Proceedings Volume 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 109760X (2018) https://doi.org/10.1117/12.2518357
Event: 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2018, Lednice, Czech Republic
Abstract
In this paper we present modification of angular photoresponse of InGaAsN-based photodiode with applied polymer (IPDIP) three-dimensional (3D) woodpile structure. 3D woodpile structure was prepared as effective diffractive element for using in optoelectronic devices with possibility of direct application on a chip surface. 3D woodpile structure was prepared using laser lithography by direct laser writing process. The effect of woodpile structure on angular photoresponse structure was investigated from goniophotometer measurements. Spatial modulation of light coupling into the photodiode chip with applied 3D woodpile structure was documented for irradiation by broad-band green light.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lubos Suslik, Matej Goraus, Petra Urbancova, Beata Sciána, Wojciech Dawidowski, and Marek Tłaczała "Modification of angular photoresponse of InGaAsN-based photodiode with 3D woodpile structures", Proc. SPIE 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 109760X (18 December 2018); https://doi.org/10.1117/12.2518357
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KEYWORDS
Photodiodes

Polymers

3D metrology

Photoresist materials

Diffraction

Lithography

Light emitting diodes

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