Capacitive micro-force sensor as a transfer standard for verification and calibration of nanoindentation instruments

Dan Xiang

doi:10.1117/12.2518952

13 May 2019 Capacitive micro-force sensor as a transfer standard for verification and calibration of nanoindentation instruments

Dan Xiang

Author Affiliations +

Proceedings Volume 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI; 1098239 (2019) https://doi.org/10.1117/12.2518952
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

A traceable micro-force sensor capable of measuring forces in the range of micronewtons to millinewtons was developed. This sensor consists of a pair of parallel electrodes to provide precise capacitance measurements. In conjunction with a traceable ultrahigh accuracy capacitance bridge, this sensor can be used as a secondary transfer micro-force standard after being calibrated against the primary forces realized with deadweights. This micro-force senor was used to verify commercial nanoindentation instruments. By comparing the measurement readings from the calibrated micro-force sensor and those recordings from a nanoindentation system, the errors of loading from that instrument can been determined. The calibration results show that significant errors present in the commercial nanoindentation instruments when their loading forces are extended to the micronewton range, which is not, and unable to be calibrated directly with available standards and current practices.

Citation Download Citation

Dan Xiang "Capacitive micro-force sensor as a transfer standard for verification and calibration of nanoindentation instruments", Proc. SPIE 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI, 1098239 (13 May 2019); https://doi.org/10.1117/12.2518952

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