Determination of vibration axes of the micromachined ring resonator for the modal tuning purposes

O. V. Morozov; I. V. Uvarov

doi:10.1117/12.2521123

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15 March 2019 Determination of vibration axes of the micromachined ring resonator for the modal tuning purposes

O. V. Morozov, I. V. Uvarov

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Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110220W (2019) https://doi.org/10.1117/12.2521123
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

In a ring-type resonator as a solid-wave gyroscope, geometric distortions due to microfabrication tolerances perturb the dynamics of the vibration modes used for angular rate sensing, thereby limiting the sensing accuracy. The imperfection of the ring shape causes an unwanted frequency split between the modes. The post-fabrication modal frequency tuning requires the information about the node/antinodes orientation of the standing waves. In this work, we investigate the vibration behavior of micromachined ring-type resonator using a laser vibrometer. Frequency response is measured around the eigenfrequencies of the second order in-plane modes. The node/antinodes location is detected from the frequency response received at the different points of the ring.

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O. V. Morozov and I. V. Uvarov "Determination of vibration axes of the micromachined ring resonator for the modal tuning purposes", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220W (15 March 2019); https://doi.org/10.1117/12.2521123

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