Hybrid acousto-nano-biosensor

Vladimir V. Kolesov; Vladimir V. Anisimkin; Iren E. Kuznetsova; Eugenii S. Soldatov; Sarkis A. Dagesyan; Alexander E. Melnikov; Vadim V. Kashin; Andrey V. Smirnov

doi:10.1117/12.2521796

15 March 2019 Hybrid acousto-nano-biosensor

Vladimir V. Kolesov, Vladimir V. Anisimkin, Iren E. Kuznetsova, Eugenii S. Soldatov, Sarkis A. Dagesyan, Alexander E. Melnikov, Vadim V. Kashin, Andrey V. Smirnov

Author Affiliations +

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110220Y (2019) https://doi.org/10.1117/12.2521796
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nanotransduces having size about 60-80 nm. These transducers were produced by using negative electron-beam nanolithography.

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Vladimir V. Kolesov, Vladimir V. Anisimkin, Iren E. Kuznetsova, Eugenii S. Soldatov, Sarkis A. Dagesyan, Alexander E. Melnikov, Vadim V. Kashin, and Andrey V. Smirnov "Hybrid acousto-nano-biosensor", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Y (15 March 2019); https://doi.org/10.1117/12.2521796

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