Laser reduction of graphene oxide thin films for nanoelectronic application

I. A. Komarov; N. S. Struchkov; D. D. Levin; G. O. Silakov; E. E. Danelyan; M. A. Orlov; S. N. Sсherbin; V. V. Bogachev; N. K. Lagodenko

doi:10.1117/12.2521802

15 March 2019 Laser reduction of graphene oxide thin films for nanoelectronic application

I. A. Komarov, N. S. Struchkov, D. D. Levin, G. O. Silakov, E. E. Danelyan, M. A. Orlov, S. N. Sсherbin, V. V. Bogachev, N. K. Lagodenko

Author Affiliations +

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110221A (2019) https://doi.org/10.1117/12.2521802
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

In this article a new approach to graphene oxide spray deposition is demonstrated. Developed spray methodic allows to fabricate uniform low thickness graphene oxide coatings on a wide range of substrates without surface hydrophilization. A comparison of films obtained by spray a spin coating methods is given. The perspectives of industrial application of developed method for production of graphene oxide bio- and gas sensors are considered. Results of graphene oxide films local reduction performed by 1030 nm continuous CO2 laser engraver and 445 nm solid-state laser are presented. Features and difficulties of thin graphene oxide films reduction are discussed.

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I. A. Komarov, N. S. Struchkov, D. D. Levin, G. O. Silakov, E. E. Danelyan, M. A. Orlov, S. N. Sсherbin, V. V. Bogachev, and N. K. Lagodenko "Laser reduction of graphene oxide thin films for nanoelectronic application", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221A (15 March 2019); https://doi.org/10.1117/12.2521802

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