PECVD silicon nitride optical waveguide devices for sensing applications in the visible and <1µm near infrared wavelength region

Rainer Hainberger; Paul Muellner; Stefan Nevlacsil; Florian Vogelbacher; Moritz Eggeling; Alejandro Maese-Novo; Martin Sagmeister; Günther Koppitsch; Jochen Kraft; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song

doi:10.1117/12.2524277

26 April 2019 PECVD silicon nitride optical waveguide devices for sensing applications in the visible and <1µm near infrared wavelength region

Rainer Hainberger, Paul Muellner, Stefan Nevlacsil, Florian Vogelbacher, Moritz Eggeling, Alejandro Maese-Novo, Martin Sagmeister, Günther Koppitsch, Jochen Kraft, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, Yanlin Song

Author Affiliations +

Proceedings Volume 11031, Integrated Optics: Design, Devices, Systems, and Applications V; 110310A (2019) https://doi.org/10.1117/12.2524277
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

We report several PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain. In particular, for the 850 nm wavelength region we discuss a low-loss broadband 1x2 power splitter and a loop mirror. In the 600 nm wavelength region, we present new results on an optically pumped integrated dye-doped polymer laser that couples its light directly into a silicon nitride waveguide. Moreover, we discuss design considerations for a waveguide based gas sensing concept detecting target gas specific absorption changes in a thin dye-doped polymer cladding layer.

Citation Download Citation

Rainer Hainberger, Paul Muellner, Stefan Nevlacsil, Florian Vogelbacher, Moritz Eggeling, Alejandro Maese-Novo, Martin Sagmeister, Günther Koppitsch, Jochen Kraft, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, and Yanlin Song "PECVD silicon nitride optical waveguide devices for sensing applications in the visible and <1µm near infrared wavelength region", Proc. SPIE 11031, Integrated Optics: Design, Devices, Systems, and Applications V, 110310A (26 April 2019); https://doi.org/10.1117/12.2524277

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available