Stability analysis of ion beam figuring removal function based on line scan

Xu Zhang; Chunyang Wang; Dasen Wang; Fengming Nie; Xiaojing Li; Shi Feng

doi:10.1117/12.2523903

24 January 2019 Stability analysis of ion beam figuring removal function based on line scan

Xu Zhang, Chunyang Wang, Dasen Wang, Fengming Nie, Xiaojing Li, Shi Feng

Proceedings Volume 11052, Third International Conference on Photonics and Optical Engineering; 110521Q (2019) https://doi.org/10.1117/12.2523903
Event: The International Conference on Photonics and Optical Engineering, 2018, Xi'an, China

Abstract

In the ion beam figuring(IBF) process, a stable removal function is the premise of ion beam figuring, and the information of removal function is generally obtained by experimental methods. Based on the study of removal function model, the stability of the removal function is analyzed by line scan method. A line scan experiment was performed on a 50mm diameter optical component, within 1h, the removal function's peak removal rate varies in 0.74%, full width at half maximum (FWHM) varies in 0.41%, and volume removal rate varies in 2.62%. The removal function is stable and can be used for actual ion beam figuring. Using this method, the stability of the removal function can be verified to ensure that it satisfies the figuring requirements.

Citation Download Citation

Xu Zhang, Chunyang Wang, Dasen Wang, Fengming Nie, Xiaojing Li, and Shi Feng "Stability analysis of ion beam figuring removal function based on line scan", Proc. SPIE 11052, Third International Conference on Photonics and Optical Engineering, 110521Q (24 January 2019); https://doi.org/10.1117/12.2523903

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