Research on pneumatic control technology of medium and large diameter double-sided polishing machine

Shuo Zhang; Hongwei Shi; Chunyang Wang; Zebiao Shan; Dasen Wang

doi:10.1117/12.2523563

24 January 2019 Research on pneumatic control technology of medium and large diameter double-sided polishing machine

Shuo Zhang, Hongwei Shi, Chunyang Wang, Zebiao Shan, Dasen Wang

Proceedings Volume 11052, Third International Conference on Photonics and Optical Engineering; 110521U (2019) https://doi.org/10.1117/12.2523563
Event: The International Conference on Photonics and Optical Engineering, 2018, Xi'an, China

Abstract

Pneumatic loading system is an important part of the control system of double-sided polishing machine. It realizes ultra-precision polishing of work piece by accurately controlling the pressure of the upper polishing disc loaded on the upper surface of the work piece. Pneumatic loading system is a typical nonlinear, time-varying system. The traditional PID control parameter setting is very complex, and it is difficult to meet the control requirements. In order to accurately control the parameters of the PID control, this paper will join the fuzzy control block in front of the PID control, make error and error change rate as input of fuzzy control, and PID control parameter as output, according to the selected membership functions and fuzzy rules correction the PID control parameters in real time, constitute adaptive fuzzy PID control. This control strategy can effectively control the pneumatic loading system, with strong stability and robustness. To achieve the stable control of polishing pressure, satisfy the accuracy requirements of medium and large diameter double-sided polishing machine.

Citation Download Citation

Shuo Zhang, Hongwei Shi, Chunyang Wang, Zebiao Shan, and Dasen Wang "Research on pneumatic control technology of medium and large diameter double-sided polishing machine", Proc. SPIE 11052, Third International Conference on Photonics and Optical Engineering, 110521U (24 January 2019); https://doi.org/10.1117/12.2523563

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