Ultra-precision temperature control of circulating cooling water based on fuzzy-PID algorithm

Yesheng Lu; Junning Cui; Yue Zhao

doi:10.1117/12.2512443

7 March 2019 Ultra-precision temperature control of circulating cooling water based on fuzzy-PID algorithm

Yesheng Lu, Junning Cui, Yue Zhao

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 1105348 (2019) https://doi.org/10.1117/12.2512443
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

Thermal pollution is one of the most urgent issues in the fields of ultra-precision measurement and manufacturing, which presents the demand of producing ultra-precision circulating cooling water (CCW) with the temperature stability up to millikelvin level and response time at hundred-second level. In this paper, an ultra-precision CCW producing method based on model identification and fuzzy-PID control is proposed and illustrated. A structure of circulating water loop with ultra-precision temperature control is proposed. A cooling module using of thermoelectric cooling device arrays as refrigerator and a heating module using electrical heating-tubes as heater are employed. A control algorithm based on fuzzy-PID is designed, and a variety of model identification experiments has been carried out to extract key parameters of the modules. Experimental results show that a temperature stability up to ±3mK is achieved, the temperature control resolution is better than 5mK, and the adjusting time of 1K step is 128s, satisfying the urgent need of ultra-precision measurement and manufacturing.

Citation Download Citation

Yesheng Lu, Junning Cui, and Yue Zhao "Ultra-precision temperature control of circulating cooling water based on fuzzy-PID algorithm", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105348 (7 March 2019); https://doi.org/10.1117/12.2512443

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