Three-dimensional shape measurement of fine structure by detecting phase distribution of only zeroth order diffraction beam based on speckle interferometry

Y. Arai

doi:10.1117/12.2525260

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21 June 2019 Three-dimensional shape measurement of fine structure by detecting phase distribution of only zeroth order diffraction beam based on speckle interferometry

Y. Arai

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Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110560B (2019) https://doi.org/10.1117/12.2525260
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

In the measurement of three-dimensional structure beyond the diffraction limit of the objective lens of the optical system using the speckle interferometry, it was reported that the shape of a measured object can be measured by detecting the change of phase distribution generated by a lateral shift instead of analyzing the focal image of the measured object. In this paper, it is investigated that the three-dimensional shape measurement can be realized by detecting the phase change of only the zeroth-order diffraction light by the lateral shift of the object using experimental results. As a result, it is confirmed that the shape information of the object is included in the zeroth-order diffraction light and that the three-dimensional shape can be measured by using only zeroth-order light without any higher order diffraction lights.

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Y. Arai "Three-dimensional shape measurement of fine structure by detecting phase distribution of only zeroth order diffraction beam based on speckle interferometry", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560B (21 June 2019); https://doi.org/10.1117/12.2525260

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