Wavelength-switchable Fizeau interferometry and its applications

Shijie Liu; Qi Lu; You Zhou; Xueke Xu; Jianda Shao; Zhouling Wu; Jian Chen; Ming Huang

doi:10.1117/12.2526377

21 June 2019 Wavelength-switchable Fizeau interferometry and its applications

Shijie Liu, Qi Lu, You Zhou, Xueke Xu, Jianda Shao, Zhouling Wu, Jian Chen, Ming Huang

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 1105627 (2019) https://doi.org/10.1117/12.2526377
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

The wavefront of coated optics is one of critical performances. Due to the interference between the coating layers, the measurement results will be totally different if the measurement wavelength is different from the working wavelength. However, all of the commercial interferometers have single measurement wavelength, which can’t treat the optical coatings working at various wavelengths. A wavelength-switchable interferometer (WSI) capable of detecting wavefront information in a wide wavelength range of 488-1064 nm is proposed in this paper. The principle of design and performance of the system are given in detail. Some typical measurement applications, such as reflection plate and optical filters will also be presented.

Citation Download Citation

Shijie Liu, Qi Lu, You Zhou, Xueke Xu, Jianda Shao, Zhouling Wu, Jian Chen, and Ming Huang "Wavelength-switchable Fizeau interferometry and its applications", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105627 (21 June 2019); https://doi.org/10.1117/12.2526377

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