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21 June 2019 Motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a grating
Shenghao Wang, Jianda Shao, Shijie Liu, Zhouling Wu, Jian Chen, Ming Huang
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Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110562G (2019) https://doi.org/10.1117/12.2524573
Event: SPIE Optical Metrology, 2019, Munich, Germany
Abstract
The measurement of the spectral diffraction efficiencies of a diffraction grating is essential for improving the manufacturing technique and for assessing the grating’s function in practical applications. The drawback of the currently popular measurement technique is its slow speed due to the hundreds of repetitions of two kinds of time-consuming mechanical movements during the measuring process. This limitation greatly restricts the usage of this technique in dynamic measurement. We present here a motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a plane grating, effectively eliminating the aforementioned two kinds of mechanical movement. We estimate that the spectral measurement can be achieved on a millisecond timescale. Our motionless and fast measuring technique will find broad applications in dynamic measurement environments and mass industrial testing.
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Shenghao Wang, Jianda Shao, Shijie Liu, Zhouling Wu, Jian Chen, and Ming Huang "Motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a grating", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110562G (21 June 2019); https://doi.org/10.1117/12.2524573
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KEYWORDS
Diffraction gratings
Integrating spheres
Measurement devices
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