Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method

Matthew Thomas; Rong Su; Nikolay Nikolaev; Jeremy Coupland; Richard Leach

doi:10.1117/12.2526015

21 June 2019 Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method

Matthew Thomas, Rong Su, Nikolay Nikolaev, Jeremy Coupland, Richard Leach

Proceedings Volume 11057, Modeling Aspects in Optical Metrology VII; 1105713 (2019) https://doi.org/10.1117/12.2526015
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Coherence scanning interferometry (CSI) is a well-established technique for measuring surface topography based on the coherence envelope and phase of interference fringes. The most commonly used surface reconstruction methods, i.e. frequency domain analysis, the envelope detection method, and the correlogram correlation method, obtain the phase of the measured field for each pixel and, from this obtain the surface height, by assuming the two are directly proportional. For surfaces with minor deviations from a plane, it is straightforward to show that the scattered field’s phase is a linear function of surface height. An alternative approach known as the “foil model” gives more generally the scattered field as the result of a linear filtering process operating on a “foil” representation of the surface. This model assumes that the surface slowly varies on the optical scale and that there is no multiple scattering. However, for surfaces that are rough at the optical scale or have coherent features (e.g. vee-grooves), the effect of multiple scattering cannot be neglected and remains a problem for reconstruction methods. Linear reconstruction methods cannot provide accurate surface topographies for complex surfaces, since for such surfaces, the measurement process of CSI is fundamentally non-linear. To develop an advanced reconstruction method for CSI, an accurate model of the imaging process is required. In this paper, a boundary elements method is used as a rigorous scattering model to calculate the scattered field at a distant boundary. Then, the CSI signal is calculated by considering the image formation as back-propagation of the scattered field, combined with the reflected reference field. Through this approach, the optical response of a CSI system can be predicted rigorously for almost any arbitrary surface geometry. Future work will include a comprehensive experimental verification of this model, and development of the non-linear surface reconstruction algorithm.

Conference Presentation

Citation Download Citation

Matthew Thomas, Rong Su, Nikolay Nikolaev, Jeremy Coupland, and Richard Leach "Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method", Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 1105713 (21 June 2019); https://doi.org/10.1117/12.2526015

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