Morphology evolution of doped phosphate glass in ion beam figuring

Gang Zhou; Ye Tian; Feng Shi; Ci Song; Yaoyu Zhong

doi:10.1117/12.2540801

8 July 2019 Morphology evolution of doped phosphate glass in ion beam figuring

Gang Zhou, Ye Tian, Feng Shi, Ci Song, Yaoyu Zhong

Proceedings Volume 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers; 1106312 (2019) https://doi.org/10.1117/12.2540801
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

For avoiding the defect of introducing contamination for doped phosphate glass in conventional polishing technology, this paper proposes the machining method of Ion Beam Figuring(IBF). Material removal mechanism is also presented from a microscopic view. Surface roughness was analyzed by changing the incidence angle of normally and 20°. The results show that both surface roughness RMS are increased a little, and the PSD(power spectral density) of surface roughness RMS is shown, too.

Citation Download Citation

Gang Zhou, Ye Tian, Feng Shi, Ci Song, and Yaoyu Zhong "Morphology evolution of doped phosphate glass in ion beam figuring", Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 1106312 (8 July 2019); https://doi.org/10.1117/12.2540801

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