Subwavelength periodic nanostructures fabricated by femtosecond laser in metal, dielectric and metal-dielectric-metal coating

Kaixin Zhang; Jianda Shao; Guohang Hu; Maria Luisa Grilli; Angela Piegari; Zhen Cao; Hongbo He; Yuanan Zhao; Anna Sytchkova

doi:10.1117/12.2540704

8 July 2019 Subwavelength periodic nanostructures fabricated by femtosecond laser in metal, dielectric and metal-dielectric-metal coating

Kaixin Zhang, Jianda Shao, Guohang Hu, Maria Luisa Grilli, Angela Piegari, Zhen Cao, Hongbo He, Yuanan Zhao, Anna Sytchkova

Author Affiliations +

Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640F (2019) https://doi.org/10.1117/12.2540704
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

Subwavelength periodic nanostructures on metal, dielectric or metal-dielectric-metal coating were fabricated by femtosecond laser. Circular apertures with diameter of ~0.6μm and a lattice period of 1.0 and 2.0 um were fabricated by single laser pulse irradiation. Surface geometries of nanostructure unit on the three kinds of coatings were compared using the scanning electron microscope and atomic force microscope. Moreover, the nanostructure units fabricated by front-side ablation technique and back-side ablation technique were compared. The minimum diameter of the circular aperture fabricated both by front-side ablation technique and back-side ablation technique could reach approximate 300 nm. By studying mechanisms of femtosecond laser interaction with metal films and dielectric films, it’s found that metal layers dominate femtosecond laser interaction with metal-dielectric-metal sandwich type coatings. It’s also found that the edges of apertures fabricated by back-side ablation technique in metal coatings and metal-dielectric-metal coatings are more regular and round than those fabricated by front-side ablation technique. Femtosecond laser fabrication therefore provides possibilities for maskless and speedy fabrication of fishnet structures which exhibit negative refractive index at optical frequencies.

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Kaixin Zhang, Jianda Shao, Guohang Hu, Maria Luisa Grilli, Angela Piegari, Zhen Cao, Hongbo He, Yuanan Zhao, and Anna Sytchkova "Subwavelength periodic nanostructures fabricated by femtosecond laser in metal, dielectric and metal-dielectric-metal coating", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640F (8 July 2019); https://doi.org/10.1117/12.2540704

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KEYWORDS

Laser ablation

Femtosecond phenomena

Metals

Nanolithography

Coating

Dielectrics

Fabrication

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