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8 July 2019 Efficient method for determination of laser conditions adopted in laser-induced micro-lithology based on laser polymerization size analysis
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Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640R (2019) https://doi.org/10.1117/12.2539750
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China
Abstract
Since negative photoresist SU-8 has become a common material for multi-photon micro-lithology, it is necessary to study laser conditions adopted in lithology process. Optical transmittance of SU-8 was tested. According to Urbach optical-absorption theory and Gaussian laser lateral spatial intensity envelope, relationship between theory and actual polymerization size of SU-8 was shown. Experimentally, we investigated multi-photon polymerization threshold and laser-induced damage of SU-8 under femtosecond laser irradiation with the pulse width of 45 fs at 800 nm by 1-on-1 tests. The polymerization and damage threshold at 45 fs are 2.7 and 8.9 TW/cm2, respectively. Polymerization and damage morphologies are shown with high contrast and polymerization sizes are measured under SEM. Theoretical polymerization sizes versus laser fluence are calculated by laser-induce multi-photon polymerization size analysis (LMPSA), including Urbach optical-absorption theory and Gaussian laser lateral spatial intensity distribution. The calculated results show that diffusion exists in the femtosecond laser-induced polymerization.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuchen Shao, Yuan'an Zhao, Hao Ma, Cheng Li, Dawei Li, and Jianda Shao "Efficient method for determination of laser conditions adopted in laser-induced micro-lithology based on laser polymerization size analysis", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640R (8 July 2019); https://doi.org/10.1117/12.2539750
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