Automated Visual Inspection Of Infrared Focal Plane Arrays

R. E. Welt; P. R. Patterson; C. B. McNeill

doi:10.1117/12.960689

25 September 1989 Automated Visual Inspection Of Infrared Focal Plane Arrays

R. E. Welt, P. R. Patterson, C. B. McNeill

Proceedings Volume 1108, Test and Evaluation of Infrared Detectors and Arrays; (1989) https://doi.org/10.1117/12.960689
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

Since 1987, SBRC has been under contract to the US Air Force (Aeronautical Systems Division, Wright-Patterson Air Force Base) for the Photovoltaic Mercury Cadmium Telluride Infrared Focal Plane Array Manufacturing Technology program. One task in this program is the development of automated visual inspection of arrays to increase effective testing, improve throughput and reduce costs. Each array produced by this program, while only a quarter inch square, has 16,384 diodes. Thorough visual inspection, electrical and physical wafer screening, and final performance testing of arrays is both difficult and time consuming. Physical defects can range from excess debris between diodes to missing or smeared indium bumps. These conditions adversely effect electrical performance and must be identified. The automated visual inspection system will be used to screen out unacceptable arrays, and to reduce costly downstream steps of hybridization (i.e. mating of an array to a readout) and final testing. This will result in reduced labor and better early attrition which will significantly lower the overall product cost, as well as increase the throughput capacity. The automated inspection system, currently under development at SBRC, is built around an Applied Intelligent Systems AIS-5000TM parallel processor. Other modules of the system include a microscope with quadocular head (four viewing ports), computer controlled X-Y stage, and variable lighting schemes. This paper will report on system hardware and software development, algorithm development and verification, and the manner in which automated inspection complements current testing methods.

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R. E. Welt, P. R. Patterson, and C. B. McNeill "Automated Visual Inspection Of Infrared Focal Plane Arrays", Proc. SPIE 1108, Test and Evaluation of Infrared Detectors and Arrays, (25 September 1989); https://doi.org/10.1117/12.960689

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KEYWORDS

Optical inspection

Inspection

Image processing

Diodes

Semiconducting wafers

Algorithm development

Mercury cadmium telluride

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