Optical response of atomically thin materials: a focus on ellipsometric measurements

Zhemi Xu; Michele Merano

doi:10.1117/12.2528385

5 September 2019 Optical response of atomically thin materials: a focus on ellipsometric measurements

Zhemi Xu, Michele Merano

Proceedings Volume 11081, Active Photonic Platforms XI; 110810O (2019) https://doi.org/10.1117/12.2528385
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

The optical constants - surface susceptibility and surface conductivity of atomically thin MoS₂ can be extracted from ellipsometric parameters using a surface current model. To improve the accuracy and ensure the reproducibility of the extracted optical constants, eliminating possible effects during the measurements is critical. Here, different substrates with various incidence angles in the ellipsometric measurements have been studied and the elimination of back-reflection from substrates have been investigated. Although the ellipsometric parameters vary with the incidence angles and substrates, excellent reproducibility of the extracted surface susceptibility and surface conductivity have been achieved.

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Citation Download Citation

Zhemi Xu and Michele Merano "Optical response of atomically thin materials: a focus on ellipsometric measurements", Proc. SPIE 11081, Active Photonic Platforms XI, 110810O (5 September 2019); https://doi.org/10.1117/12.2528385

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