Visible to mid-infrared integrated sensors for air quality measurement

S. Boutami; G. Jobert; P. Barritault; J. G. Coutard; M. Fournier; J. M. Fédéli; P. Labeye; A. Marchant; J. Skubich; A. Teulle; O. Lartigue; E. Lorent; A. Glière; C. Constancias; S. Nicoletti; C. Jamois; C. Seassal; L. Duraffourg

doi:10.1117/12.2529262

9 September 2019 Visible to mid-infrared integrated sensors for air quality measurement

S. Boutami, G. Jobert, P. Barritault, J. G. Coutard, M. Fournier, J. M. Fédéli, P. Labeye, A. Marchant, J. Skubich, A. Teulle, O. Lartigue, E. Lorent, A. Glière, C. Constancias, S. Nicoletti, C. Jamois, C. Seassal, L. Duraffourg

Author Affiliations +

Proceedings Volume 11088, Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019; 110880R (2019) https://doi.org/10.1117/12.2529262
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

We present several integrated technologies on Silicon, from visible to mid-infrared, for particulate matter and gas detection. We present new concepts to detect in the visible particulate matter with a high sensitivity and a discrimination of both particle sizes and refractive indices. For gas detection, mid-infrared technologies developments include on one hand, microhotplate thermal emitters, as a cheap solution for gas sensing, eventually enhanced by plasmonics, and on the other hand quantum cascade lasers-based photoacoustic sensors, for high precision measurement, and for which the integration on Silicon is pushed forward for a reduction of costs.

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S. Boutami, G. Jobert, P. Barritault, J. G. Coutard, M. Fournier, J. M. Fédéli, P. Labeye, A. Marchant, J. Skubich, A. Teulle, O. Lartigue, E. Lorent, A. Glière, C. Constancias, S. Nicoletti, C. Jamois, C. Seassal, and L. Duraffourg "Visible to mid-infrared integrated sensors for air quality measurement", Proc. SPIE 11088, Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019, 110880R (9 September 2019); https://doi.org/10.1117/12.2529262

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