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9 September 2019 Visible to mid-infrared integrated sensors for air quality measurement
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Abstract
We present several integrated technologies on Silicon, from visible to mid-infrared, for particulate matter and gas detection. We present new concepts to detect in the visible particulate matter with a high sensitivity and a discrimination of both particle sizes and refractive indices. For gas detection, mid-infrared technologies developments include on one hand, microhotplate thermal emitters, as a cheap solution for gas sensing, eventually enhanced by plasmonics, and on the other hand quantum cascade lasers-based photoacoustic sensors, for high precision measurement, and for which the integration on Silicon is pushed forward for a reduction of costs.
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S. Boutami, G. Jobert, P. Barritault, J. G. Coutard, M. Fournier, J. M. Fédéli, P. Labeye, A. Marchant, J. Skubich, A. Teulle, O. Lartigue, E. Lorent, A. Glière, C. Constancias, S. Nicoletti, C. Jamois, C. Seassal, and L. Duraffourg "Visible to mid-infrared integrated sensors for air quality measurement", Proc. SPIE 11088, Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019, 110880R (9 September 2019); https://doi.org/10.1117/12.2529262
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