Effect of Tantalum and MgO adhesion layers on plasmonic nanostructures

Parinaz Sadri-Moshkenani; Mohammad Wahiduzzaman Khan; Mustafa Mert Bayer; Md Shafiqul Islam; Eric Montoya; Ilya Krivortov; Mikael Nilsson; Nader Bagherzadeh; Ozdal Boyraz

doi:10.1117/12.2531898

3 September 2019 Effect of Tantalum and MgO adhesion layers on plasmonic nanostructures

Parinaz Sadri-Moshkenani, Mohammad Wahiduzzaman Khan, Mustafa Mert Bayer, Md Shafiqul Islam, Eric Montoya, Ilya Krivortov, Mikael Nilsson, Nader Bagherzadeh, Ozdal Boyraz

Author Affiliations +

Proceedings Volume 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI; 1108916 (2019) https://doi.org/10.1117/12.2531898
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

Plasmonic structures have a wide variety of sensing applications because of their high field localization effect that leads to high sensitivity at lower powers. Specifically, plasmonic nanohole arrays are attractive platforms for sensing because of their easy alignment and measurement. In terms of fabricating these sensors, usually an adhesion layer is needed to ensure firm contact between the plasmonic metal layer and the substrate. Most fabrication efforts rely on titanium or chromium based metallic adhesion layers. However, the presence of the adhesion layer may hinder the plasmonic resonance by broadening the resonance and reducing the plasmonic field enhancement. This leads to degradation of sensing capabilities. We investigate the effect of tantalum, chromium, and titanium adhesion layers on plasmonic sensors made of nanohole arrays. Using the bulk refractive index data for metallic adhesion layers, we show that tantalum has the potential to show less damping effect compared to commonly used chromium and titanium. However, it still causes significant damping because of its high absorption, which becomes even larger for tantalum thin film according to our ellipsometry measurement results. We also propose here to use MgO dielectric adhesion layers to avoid the damping effect. Our investigation on MgO adhesion layers shows strong adhesion properties without scarifying sensor performance. Moreover, we will present an alternate sensor geometry that is less prone to damping by the adhesion layer and that can enhance the plasmonic resonance even if there is a metallic adhesion layer.

Citation Download Citation

Parinaz Sadri-Moshkenani, Mohammad Wahiduzzaman Khan, Mustafa Mert Bayer, Md Shafiqul Islam, Eric Montoya, Ilya Krivortov, Mikael Nilsson, Nader Bagherzadeh, and Ozdal Boyraz "Effect of Tantalum and MgO adhesion layers on plasmonic nanostructures", Proc. SPIE 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, 1108916 (3 September 2019); https://doi.org/10.1117/12.2531898

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Plasmonics

Tantalum

Thin films

Nanostructures

Chromium

Metals

Dielectrics

Show All Keywords

Keywords/Phrases

Search In:

Publication Years