Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Peter de Groot; Xavier Colonna de Lega; Rong Su; Richard Leach

doi:10.1117/12.2526654

3 September 2019 Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Peter de Groot, Xavier Colonna de Lega, Rong Su, Richard Leach

Author Affiliations +

Proceedings Volume 11102, Applied Optical Metrology III; 111020G (2019) https://doi.org/10.1117/12.2526654
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Interferometers for the measurement of surface form and texture have a reputation for high performance. However, the results for many types of surface features can deviate from the expectation of one cycle of phase shift per half wavelength of surface height. Here we review the fundamentals of imaging interferometry and describe ways of defining instrument response, including the linear instrument transfer function. These considerations define practical regimes of linear behavior that are usually satisfied for traditional uses of interferometers; but that are increasingly challenged by applications involving complex textures and high surface slopes. We conclude by proposing pathways for further improving performance on difficult surface structures using advanced modeling techniques.

Citation Download Citation

Peter de Groot, Xavier Colonna de Lega, Rong Su, and Richard Leach "Does interferometry work? A critical look at the foundations of interferometric surface topography measurement", Proc. SPIE 11102, Applied Optical Metrology III, 111020G (3 September 2019); https://doi.org/10.1117/12.2526654

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