Linear algebra approach to phase shifting interferometry: numerical methods

Marco A. Escobar; Julio C. Estrada; Javier Vargas

doi:10.1117/12.2530125

3 September 2019 Linear algebra approach to phase shifting interferometry: numerical methods

Marco A. Escobar, Julio C. Estrada, Javier Vargas

Proceedings Volume 11102, Applied Optical Metrology III; 111020M (2019) https://doi.org/10.1117/12.2530125
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

We model a set of Phase-Shifting Interferogram (PSI) images in a new and versatile way that allows exploring interesting numerical approaches for the analysis of PSI. We show how this representation can be used to recover the modulating phase if the phase steps are known, and we also show how it can be used as the baseline for an iterative algorithm. For the case in which the phase steps are known we compare against the four step algorithm. For the case of unknown phase steps, we compare against the Principal Component Analysis (PCA) and the Advanced Iterative Algorithm (AIA).

Conference Presentation

Citation Download Citation

Marco A. Escobar, Julio C. Estrada, and Javier Vargas "Linear algebra approach to phase shifting interferometry: numerical methods", Proc. SPIE 11102, Applied Optical Metrology III, 111020M (3 September 2019); https://doi.org/10.1117/12.2530125

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