3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform

Takamasa Suzuki; Bin Liu; Samuel Choi

doi:10.1117/12.2534005

3 September 2019 3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform

Takamasa Suzuki, Bin Liu, Samuel Choi

Proceedings Volume 11102, Applied Optical Metrology III; 111021A (2019) https://doi.org/10.1117/12.2534005
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

In this study, we propose a spectral-domain optical coherence tomography (OCT) method that employs pulse irradiation to capture an interferogram and continuous wavelet transform (CWT) for data analysis. The pulse irradiation technique enables obtaining an interferogram with a high signal-to-noise ratio, and the CWT allows accurate analysis of a nonstationary signal. Experimental results obtained using a cover glass of thickness 150 μm confirmed that the repetitive measurement error was 0.32 μm. However, this error was reduced to 0.23 μm when pulse irradiation was applied for image capture.

Conference Presentation

Citation Download Citation

Takamasa Suzuki, Bin Liu, and Samuel Choi "3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform", Proc. SPIE 11102, Applied Optical Metrology III, 111021A (3 September 2019); https://doi.org/10.1117/12.2534005

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