Forming an ultrathin and lightweight x-ray micropore optics into a single substrate

K. Nomoto; K. Doi; Y. Nawaki; K. Uetsuki; R. Hata; K. Tsuruoka; H. Kodaka; H. Itoh; Y. Harada; Y. Asakawa

doi:10.1117/12.2525562

9 September 2019 Forming an ultrathin and lightweight x-ray micropore optics into a single substrate

K. Nomoto, K. Doi, Y. Nawaki, K. Uetsuki, R. Hata, K. Tsuruoka, H. Kodaka, H. Itoh, Y. Harada, Y. Asakawa

Proceedings Volume 11108, Advances in X-Ray/EUV Optics and Components XIV; 111080P (2019) https://doi.org/10.1117/12.2525562
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Compact and lightweight X-ray micropore optics with high quality stability have been developed utilizing our microfabrication technology. We have fabricated Schmidt type Lobster Eye Optics named Pre Bread Board Model (PreBBM). This optics has a plurality of oblique grooves having a width of 10 um formed by laser modification and wet etching in flat glass substrate. Both smoothing by annealing and Pt coating were applied on the groove surface to complete Pre-BBM. And we conducted the first X-ray irradiation test. In order to obtain high X-ray reflectivity, next challenge is to reduce surface roughness of the micropore side wall to nanometers or less. We adopted magnetic fluid polishing and glass annealing technology as a method to reduce surface roughness of the glass. We are trying to optimize the condition to achieve side wall surface roughness of 1 nm.

Conference Presentation

Citation Download Citation

K. Nomoto, K. Doi, Y. Nawaki, K. Uetsuki, R. Hata, K. Tsuruoka, H. Kodaka, H. Itoh, Y. Harada, and Y. Asakawa "Forming an ultrathin and lightweight x-ray micropore optics into a single substrate", Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 111080P (9 September 2019); https://doi.org/10.1117/12.2525562

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