A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers

Bernd Grubert; David Kreitschik; Olaf Schnabel; Frank Siewert; Ralf D. Geckeler; Matthias Schumann; Andreas Just; Michael Krause; Tanfer Yandayan; S. Asli Akgoz

doi:10.1117/12.2531613

9 September 2019 A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers

Bernd Grubert, David Kreitschik, Olaf Schnabel, Frank Siewert, Ralf D. Geckeler, Matthias Schumann, Andreas Just, Michael Krause, Tanfer Yandayan, S. Asli Akgoz

Author Affiliations +

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 1110902 (2019) https://doi.org/10.1117/12.2531613
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

A new Aperture Centring Device (ACenD) for precisely positioning small apertures with respect to the autocollimator’s optics has been developed. With the new device, differences in the angle response of autocollimators between the calibration at a laboratory and their subsequent application in the slope measuring profilers are significantly minimized. Evaluation of the device with a circular aperture size of d=2.5 mm was carried out in different laboratories. It was verified that the ACenD is capable of achieving a reproducible aperture alignment < 0.1 mm. The device is a substantial aid for the operation of slope measuring profilometers and enables the measurable, documentable, and transferable positioning of apertures that did not exist before.

Citation Download Citation

Bernd Grubert, David Kreitschik, Olaf Schnabel, Frank Siewert, Ralf D. Geckeler, Matthias Schumann, Andreas Just, Michael Krause, Tanfer Yandayan, and S. Asli Akgoz "A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110902 (9 September 2019); https://doi.org/10.1117/12.2531613

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