One-dimensional ion-beam figuring solution from Brookhaven National Laboratory

Tianyi Wang; Lei Huang; Matthew Vescovi; Dennis Kuhne; Kashmira Tayabaly; Nathalie Bouet; Mourad Idir

doi:10.1117/12.2526074

9 September 2019 One-dimensional ion-beam figuring solution from Brookhaven National Laboratory

Tianyi Wang, Lei Huang, Matthew Vescovi, Dennis Kuhne, Kashmira Tayabaly, Nathalie Bouet, Mourad Idir

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 1110909 (2019) https://doi.org/10.1117/12.2526074
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

We demonstrate a novel One-Dimensional Ion-Beam Figuring (1D-IBF) solution from Brookhaven National Laboratory. Three improvements are introduced to the new 1D-IBF system. First, the misalignment of the coordinate systems between the metrology and the 1D-IBF hardware is minimized by integrating both the sample mirror and the Beam Removal Function (BRF) mirror into a single mirror holder. The measured BRF center is then used as a reference to calibrate the coordinate correspondence. Second, a Constrained Linear Least-Squares (CLLS) algorithm with a coarse-to-fine scheme is proposed to keep the non-negativity of the dwell time as well as ensure it smoothly duplicate the required removal amount. Third, a dwell time slicing strategy is used to smooth the implementation of the dwell time in the real 1D-IBF fabrication process. Experimental results demonstrate that the proposed 1D-IBF solution reduces the residual profile errors to sub-nanometer Root Mean Square (RMS) for both flat and spherical mirrors.

Conference Presentation

Citation Download Citation

Tianyi Wang, Lei Huang, Matthew Vescovi, Dennis Kuhne, Kashmira Tayabaly, Nathalie Bouet, and Mourad Idir "One-dimensional ion-beam figuring solution from Brookhaven National Laboratory", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110909 (9 September 2019); https://doi.org/10.1117/12.2526074

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