Three-dimensional shape measurement of an ellipsoidal mirror by industrial x-ray computed tomography

Satsuki Shimizu; Yoko Takeo; Gota Yamaguchi; Yutaka Ohtake; Yukie Nagai; Hidekazu Mimura

doi:10.1117/12.2530321

9 September 2019 Three-dimensional shape measurement of an ellipsoidal mirror by industrial x-ray computed tomography

Satsuki Shimizu, Yoko Takeo, Gota Yamaguchi, Yutaka Ohtake, Yukie Nagai, Hidekazu Mimura

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 111090I (2019) https://doi.org/10.1117/12.2530321
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

An ellipsoidal mirror is a soft X-ray reflective focusing device. We are developing precise ellipsoidal mirrors based on an electroforming process. To improve the fabrication process, three-dimensional shape measurements with a high accuracy are required. In this research we develop a method to measure ellipsoidal shapes by industrial X-ray computed tomography (CT). The X-ray CT process consists of measuring the mirror shape and determining the parameters of the ellipsoid. We also evaluate the reproducibility of X-ray CT measurements and clarify that the accuracy is at the 5-m level.

Citation Download Citation

Satsuki Shimizu, Yoko Takeo, Gota Yamaguchi, Yutaka Ohtake, Yukie Nagai, and Hidekazu Mimura "Three-dimensional shape measurement of an ellipsoidal mirror by industrial x-ray computed tomography", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090I (9 September 2019); https://doi.org/10.1117/12.2530321

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