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9 September 2019 The design of a transmission tender x-ray microscope at Taiwan Photon Source (Conference Presentation)
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The project of transmission x-ray microscope (TXM) with tender x-ray is undergoing as an extension project of the soft x-ray tomography (SXT) endstation at Taiwan Photon Source (TPS). This TXM is aimed for energy from 1.5 keV to 2.4 keV and with phase contrast with the x-ray energy of 2.4 keV. As the extension of current SXT project, the beamline will be equipped with a variable line spacing (VLS) grating with the multi-layer coating which will be optimized for 2.4 keV. This TXM will be zoneplate based with a phase ring and capillary condenser. In order to match the field of view and numerical aperture (NA) of zoneplate with the emittance of the source in vertical direction, some compromise should be made. To match the low emittance of vertical direction, the NA of zoneplate should be lower and vertical of the secondary source should be larger. This will lower spatial resolution and energy resolution. The targeting resolution of this TXM for phase contrast will be 50nm and FOV is 20 μm. For the detector, which is currently design with a scintillator with a CCD detector. For the future, the direct detector for small pixel and high signal to noise ratio can be obtained. The other components of TXM, such as stages, cryo system, which can be shared with current SXT system which works under the energy of the water window region. This endstation for tender X-ray will be commission in 2020. The detailed design and current progress will be discussed in this presentation.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gung-Chian Yin, Bo-Yi Chen, Ming-Ying Hsu, Chien-yu Lee, Huang-Yeh Chen, Cheng Liang Liao , Yi-Jr Su, Yu-Shan Huang, and Lee-Jene Lai "The design of a transmission tender x-ray microscope at Taiwan Photon Source (Conference Presentation)", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120A (9 September 2019);


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