Instrumentation and method developments of x-ray ptychography at the Advanced Photon Source

Junjing Deng; Yudong Yao; Yi Jiang; Si Chen; Jeffrey A. Klug; Michael Wojcik; Fabricio S. Marin; Curt Preissner; Christian Roehrig; Zhonghou Cai; Stefan Vogt; Barry Lai

doi:10.1117/12.2529805

9 September 2019 Instrumentation and method developments of x-ray ptychography at the Advanced Photon Source

Junjing Deng, Yudong Yao, Yi Jiang, Si Chen, Jeffrey A. Klug, Michael Wojcik, Fabricio S. Marin, Curt Preissner, Christian Roehrig, Zhonghou Cai, Stefan Vogt, Barry Lai

Author Affiliations +

Proceedings Volume 11112, X-Ray Nanoimaging: Instruments and Methods IV; 111120E (2019) https://doi.org/10.1117/12.2529805
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Among different techniques based on x-ray nanoimaging, ptychography has become a popular tool to study specimens at nanometer-scale resolution without the need of using high-resolution optics that requires very stringent manufacturing processes. This high-resolution imaging method is compatible with other imaging modalities acquired in scanning microscopy. At the Advance Photon Source (APS), we have developed two fluorescence microscopes for simultaneous ptychography and fluorescence imaging which together provide a powerful technique to study samples in biology, environmental science, and materials science. Combined with different tilted sample projections, such correlative methods can yield high-resolution 3D structural and chemical images. More recent work has been focused on the development of a fast ptychography instrument called the Velociprobe which is built to take advantage of the over 100 times higher coherent flux provided by the coming APS upgrade source. The Velociprobe uses high-bandwidth accurate interferometry and advanced motion controls with fast continuous scanning schemes which are optimized for large-scale samples and 3D high-resolution imaging. This instrument has been demonstrated to obtain sub-10 nm resolution with different high-photon-efficient scanning schemes using fast data acquisition rate up to 3 kHz (currently limited by detector's full continuous frame rate). A ptychographic imaging rate of 100 _m2/second with a sub-20 nm spatial resolution was shown in this paper.

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Junjing Deng, Yudong Yao, Yi Jiang, Si Chen, Jeffrey A. Klug, Michael Wojcik, Fabricio S. Marin, Curt Preissner, Christian Roehrig, Zhonghou Cai, Stefan Vogt, and Barry Lai "Instrumentation and method developments of x-ray ptychography at the Advanced Photon Source", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120E (9 September 2019); https://doi.org/10.1117/12.2529805

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