Focusing of hard x-rays with monolithic two-dimensional multilayer Laue lenses: technical challenges and current status

Weihe Xu; Wei Xu; Nathalie Bouet; Juan Zhou; Hanfei Yan; Xiaojing Huang; Ming Lu; Yong S. Chu; Evgeny Nazaretski

doi:10.1117/12.2527510

9 September 2019 Focusing of hard x-rays with monolithic two-dimensional multilayer Laue lenses: technical challenges and current status

Weihe Xu, Wei Xu, Nathalie Bouet, Juan Zhou, Hanfei Yan, Xiaojing Huang, Ming Lu, Yong S. Chu, Evgeny Nazaretski

Author Affiliations +

Proceedings Volume 11112, X-Ray Nanoimaging: Instruments and Methods IV; 111120O (2019) https://doi.org/10.1117/12.2527510
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Hard X-ray microscopy is a powerful scientific tool capable of providing sub-10 nm spatial resolution imaging of material’s chemical composition and internal structure. Multilayer Laue Lenses (MLLs) have been developed and used for hard x-ray nanofocusing. MLLs are one dimensional X-ray diffractive optics fabricated through multilayer deposition and sectioning. An orthogonal alignment of two MLLs yields a point focus; 10 milli-degree orthogonality and sub-10 µm positioning accuracy along the beam direction is required to avoid astigmatism and achieve 10 nm focal spot size at 12 keV photon energy. Up-to-date, developed x-ray microscopy systems were equipped with eight degrees of nano-scale motion to perform full alignment of individual MLL optics. Bonding of two individual lenses together in pre-determined configuration significantly simplifies alignment process and makes them compatible with a more conventional Zone Plate – based microscopes. In this work, we give an overview of the existing bonding effort and present our approach to fabricate a monolithic 2D MLL optic.

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Weihe Xu, Wei Xu, Nathalie Bouet, Juan Zhou, Hanfei Yan, Xiaojing Huang, Ming Lu, Yong S. Chu, and Evgeny Nazaretski "Focusing of hard x-rays with monolithic two-dimensional multilayer Laue lenses: technical challenges and current status", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120O (9 September 2019); https://doi.org/10.1117/12.2527510

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