Presentation + Paper
9 September 2019 Ion-beam figuring of x-ray mirrors
Carsten Schulze, Matthias Nestler, Michael Zeuner
Author Affiliations +
Abstract
A significant portion toward understanding evolution of the universe comes from x-ray astronomy since many astronomical objects of interest, such as black holes, supernovae and distant galaxies, emit radiation in the x-ray band. As basically all materials have almost unity refractive index for x-rays focusing x-ray beams is only possible by reflection at grazing incidence. Due to the low photon flux of the objects under study (few photons per hour) each individual photon is of particular interest. Thus, the collective area of x-ray telescopes needs to be as large as possible which is achieved by a large amount of concentrically nested x-ray mirrors whose shape needs to be ideal fitting to the designed geometry for high image quality. Due to the mirrors' curvature even state of the art mechanical machining and chemical mechanical polishing processes leave a residual surface error of several hundred nanometers. Those residual errors can be significantly reduced by ion beam figuring.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Carsten Schulze, Matthias Nestler, and Michael Zeuner "Ion-beam figuring of x-ray mirrors", Proc. SPIE 11116, Astronomical Optics: Design, Manufacture, and Test of Space and Ground Systems II, 1111613 (9 September 2019); https://doi.org/10.1117/12.2530212
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Ion beams

Mirrors

Etching

Silicon

X-ray telescopes

Dry etching

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