Laser terahertz emission microscope for real world application (Conference Presentation)

Masayoshi Tonouchi

doi:10.1117/12.2530070

12 September 2019 Laser terahertz emission microscope for real world application (Conference Presentation)

Masayoshi Tonouchi

Proceedings Volume 11124, Terahertz Emitters, Receivers, and Applications X; 111240T (2019) https://doi.org/10.1117/12.2530070
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

One can observe terahertz (THz) radiation from various kinds of materials, when excited with a femtosecond laser. The observation of the THz waveforms enables us to explore ultrafast nature of electronic materials and devices as THz emission spectroscopy. When one excites the THz emission from a certain substance with the laser and visualizes the emission images by scanning the laser beam on it, the resolution of the images is limited by the laser beam diameter rather than THz wavelength. Thus, construction of a laser-THz emission microscope (LTEM) would provide a new tool for material/device science and industrial applications. We proposed and have been developing LTEM since 1996 and evaluated various materials and devices such as high-Tc superconductors, manganites, ferroelectrics, wide gap semiconductors, and VLSIs. Here we present recent progress on the study focusing on semiconductor industry application. the noncontact local evaluation of m-plane GaN wafers, deep-inside of multi-junction solar cells, failures in VLSIs, and the surface potential of passivated Si wafers will be introduced.

Conference Presentation

Citation Download Citation

Masayoshi Tonouchi "Laser terahertz emission microscope for real world application (Conference Presentation)", Proc. SPIE 11124, Terahertz Emitters, Receivers, and Applications X, 111240T (12 September 2019); https://doi.org/10.1117/12.2530070

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available