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11 October 1989Surface Flatness Measurement System
We have developed a laser surface flatness measurement system, based on a new measurement principle. It measures angular displacements at a fixed interval, then caliculates the surface profile by totaling the angular data multiplies with the measurement pitch. With calibration, our system's measurement accuracy is better than 0.01 μm at about 1 mm/s.
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S. Wakana, M. Inada, Y. Goto, M. Nakashima, "Surface Flatness Measurement System," Proc. SPIE 1113, Reflective Optics II, (11 October 1989); https://doi.org/10.1117/12.955591