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11 October 1989 Surface Flatness Measurement System
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Abstract
We have developed a laser surface flatness measurement system, based on a new measurement principle. It measures angular displacements at a fixed interval, then caliculates the surface profile by totaling the angular data multiplies with the measurement pitch. With calibration, our system's measurement accuracy is better than 0.01 μm at about 1 mm/s.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Wakana, M. Inada, Y. Goto, and M. Nakashima "Surface Flatness Measurement System", Proc. SPIE 1113, Reflective Optics II, (11 October 1989); https://doi.org/10.1117/12.955591
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