Novel cleaning technology for nanoparticle removal

Mana Tanabe; Kosuke Takai; Kyo Otsubo; Kaori Umezawa; Minako Iinuma; Hideaki Sakurai; Shingo Kanamitsu

doi:10.1117/12.2536471

29 September 2019 Novel cleaning technology for nanoparticle removal

Mana Tanabe, Kosuke Takai, Kyo Otsubo, Kaori Umezawa, Minako Iinuma, Hideaki Sakurai, Shingo Kanamitsu

Proceedings Volume 11148, Photomask Technology 2019; 111480N (2019) https://doi.org/10.1117/12.2536471
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States

Abstract

It’s generally said that the management of particles is important. In DUV lithography, it’s needed to remove particles on photomask surface not to induce patterning defects on wafer. Moreover, in Nanoimprint lithography (NIL), particles on template cause not only patterning defects on wafer but also its own pattern collapse. Therefore, these particles have to be entirely removed from substrate surface with cleaning technology. In this paper, we proposed ‘Freeze Cleaning’ which has more than 99% PRE for 40nm SiN standard nanoparticle without pattern collapse and critical dimension (CD) shift. And it was also demonstrated that soft defects on template which remained after conv. cleaning could be removed with Freeze Cleaning. These results predict that Freeze Cleaning will contribute to progress of photomask and template technology to next stage.

Conference Presentation

Citation Download Citation

Mana Tanabe, Kosuke Takai, Kyo Otsubo, Kaori Umezawa, Minako Iinuma, Hideaki Sakurai, and Shingo Kanamitsu "Novel cleaning technology for nanoparticle removal", Proc. SPIE 11148, Photomask Technology 2019, 111480N (29 September 2019); https://doi.org/10.1117/12.2536471

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available