High throughput AFM inspection system with parallel active cantilevers

M. Holz; C. Reuter; A. Reum; A. Ahmad; M. Hofmann; T. Ivanov; I. W. Rangelow; J. Stauffenberg; E. Manske; C. Du; X. Q. Zhou; N. Okamoto; A. N. Takashima; H. S. Lee

doi:10.1117/12.2537009

26 September 2019 High throughput AFM inspection system with parallel active cantilevers

M. Holz, C. Reuter, A. Reum, A. Ahmad, M. Hofmann, T. Ivanov, I. W. Rangelow, J. Stauffenberg, E. Manske, C. Du, X. Q. Zhou, N. Okamoto, A. N. Takashima, H. S. Lee

Author Affiliations +

Proceedings Volume 11148, Photomask Technology 2019; 111481E (2019) https://doi.org/10.1117/12.2537009
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States

Abstract

Atomic Force Microscopes are capable to provide non-destructive high resolution, CD-metrology and precise defect analysis. However, a conventional AFM has not enough throughput for today’s large scale semiconductor manufacturing. The primary point remains the increase of the scanning area in case of large wafers, masks, displays or dies. Cantilever array-based AFMs are intended to increase the imaging throughput by parallelizing the work of many AFM probes that may be practiced by parallel AFM systems that are capable to operate autonomously. An active cantilever scheme makes it possible to sense electronically the deflection and individually to control the actuation of every cantilever in the array. Each cantilever in the array represents a self-sustaining AFM-hardware system for metrology and imaging. In that, the multiple parallel probes are forming many AFMs capable to work independently.

Citation Download Citation

M. Holz, C. Reuter, A. Reum, A. Ahmad, M. Hofmann, T. Ivanov, I. W. Rangelow, J. Stauffenberg, E. Manske, C. Du, X. Q. Zhou, N. Okamoto, A. N. Takashima, and H. S. Lee "High throughput AFM inspection system with parallel active cantilevers", Proc. SPIE 11148, Photomask Technology 2019, 111481E (26 September 2019); https://doi.org/10.1117/12.2537009

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available