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The realization of a high-performance tunable (THz) absorber based on microelectromechanical system (MEMS) is challenging, primarily due to the severe mismatch between the actuation range of most MEMS (on the order of 1-10 microns) and THz wavelengths on the order of 100-1000 microns. Based on a metamaterial design that has an electromagnetic response that is extremely position sensitive, we combine meta-atoms with suspended at membranes that can be driven electrostatically. This is demonstrated by using near-field coupling of the meta-atoms to create a substantial change in the resonant frequency. The devices created in this manner are among the best-performing tunable THz absorbers demonstrated to date, with an ultrathin device thickness ( 1/50 of the working wavelength), absorption varying between 60% and 80% in the initial state when the membranes remain suspended, and with a fast switching speed ( 27 us). In the snap-down state, the resonance shifts by γ >200% of the linewidth (14% of the initial resonance frequency), and the absorption modulation measured at the initial resonance can reach 65%. |
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